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The vertical diffusion furnace equipment can be applied in integrated circuits, discrete components, POWER, MEMS, and other fields, suitable for oxidation, diffusion, GPP, annealing, and alloy processes on 6-12 inch silicon wafers.

The diffusion process involves inserting impurity elements into the silicon substrate at high temperatures using thermal diffusion principles to achieve a specific concentration distribution, altering the material's electrical properties and forming semiconductor device structures. It can be used to create PN junctions or components such as resistors, capacitors, diodes, and transistors in integrated circuits.

This equipment system is a vertical single-chamber furnace with highly automated process control. It mainly includes the main unit, power cabinet, gas cabinet, heating system, and transmission system.

2. Equipment Parameter Types:

3. Main Features and Advantages of the Equipment

1★ Powerful operation capabilities, Windows interface, display screen operation, allowing users to conveniently modify process control parameters and monitor various process statuses in real-time; equipped with fault self-diagnosis software, significantly reducing maintenance time;

2★ Reliable industrial computer + PLC mode for fully automated control of furnace temperature, boat movement, gas flow, and valves, achieving complete process automation;

3★ Programs support manual/automatic operation; after power failure or mid-process interruption, restarting allows temperature ramp-up based on the process, saving process time;

4★ Multiple process pipelines available for user convenience;

5★ Boat movement control uses high-speed pulse closed-loop control to avoid step loss and vibration during operation. After completing a cycle, the boat automatically calibrates its position to prevent positioning deviation;

6★ Precise gas flow control with analog signal closed-loop control, strong/weak electrical separation, standard bus for data exchange to enhance anti-interference capability and ensure data security; gas valves feature soft-start functionality;

7★ Multiple alarm and safety protection functions;
8★ Automatic adjustment of constant temperature zones, cascade control, accurately controlling the actual process temperature of reaction tubes;